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Wafer defect inspection equipment

Inspection of common defects in production line

High efficiency、High detection rate、Intelligence、Comprehensiveness

CharacteristicScene

High efficiency: The high-speed synchronous motion control technology are adopted to meet the requirements of high-efficiency inspection of IC products in allareas.

High detection rate: Feature-based machine learning algorithm are adopted to effectively identify subtle defects andenhance defect inspection rate.

Intelligence: Prescription auxiliary editing function are available, personnel efficiencyand be greatlyimprovedand new product introduction cycle can be greatlyshortened.

Comprehensiveness: The automatic inspection of each process of IC is available, andit has good material compatibility.

Factory automation:It supportsSECS/GEM SEMI standard, which can fully meet the requirements of factory automation.

    WeChat official account

      • 合肥地址:安徽省合肥市高新区华佗巷469号1号楼
        上海地址:中国(上海)自由贸易试验区祖冲之路899号11栋
        合肥电话:0551-65116087
        上海电话:021-50935077
        Email: admin@yuweitk.com